SEM Sample Coating Unit
Sputter Coating
Leica (EM ACE600, High vacuum)
Device Description
High Vacuum Metal and Carbon Coating Device: It is used for coating the surface of non-conductive samples to be examined in electron microscope.
- Metal coating current 150mA
- Coating thickness 1 – 1000 nm
- Covering capacity of 18 ½ SEM samples at the same time
- Vacuum value at least 2×10-6 mbar
- Au Coating
- Au/Pd Coating
- Carbon coating
